Multi-terahertz sidewall-etched varactor diodes and their application in submillimetre-wave sampling circuits

Abstract

Schottky varactor diodes with 4THz cutoff frequencies were fabricated using lμm lithography and sclfaligned RIE sidewall etching. These diodes were incorporated into nonlinear transmission line pulse generators that produced 3 V steps with 0.68ps 10–90% fall time. The lines were measured with integrated sampling circuits that had 515 GHz bandwidth.