Effects of grain orientation on hillock formation and grain growth in aluminum films on silicon substrates
- 1 August 1992
- journal article
- Published by Elsevier in Scripta Metallurgica et Materialia
- Vol. 27 (3), 285-290
- https://doi.org/10.1016/0956-716x(92)90513-e
Abstract
No abstract availableKeywords
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