Growth of epitaxial TiN films deposited on MgO(100) by reactive magnetron sputtering: The role of low-energy ion irradiation during deposition
- 1 October 1988
- journal article
- Published by Elsevier BV in Journal of Crystal Growth
- Vol. 92 (3-4), 639-656
- https://doi.org/10.1016/0022-0248(88)90048-6
Abstract
No abstract availableThis publication has 40 references indexed in Scilit:
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