Heterodyne interferometry with a frequency-modulated laser diode
- 1 January 1988
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 27 (1), 124-128
- https://doi.org/10.1364/ao.27.000124
Abstract
A digital phase measuring interferometer with a frequency-modulated laser diode using the integratedbucket technique is described. The injection current is continuously changed to introduce a time- varying phase difference between the two beams of an unbalanced Twyman-Green interferometer. The intensity of the interference patterns is integrated with a CCD array sensor for intervals of one-quarter period of the fringe. Using the intensity data a microcomputer calculates the phase to be detected. Some experimental results with the interferometer are presented; the rms repeatability obtained was λ/80.This publication has 8 references indexed in Scilit:
- Digital phase-measuring interferometry with a tunable laser diodeOptics Letters, 1987
- Diode laser direct modulation heterodyne interferometerApplied Optics, 1987
- Interferometric investigation of a diode laser sourceApplied Optics, 1985
- Wavelength-change characteristics of semiconductor lasers and their application to holographic contouringOptics Letters, 1985
- Least-squares estimation in phase-measurement interferometryOptics Letters, 1982
- Real-Time InterferometerOptical Engineering, 1979
- Use of an ac heterodyne lateral shear interferometer with real–time wavefront correction systemsApplied Optics, 1975
- Digital Wavefront Measuring Interferometer for Testing Optical Surfaces and LensesApplied Optics, 1974