The surface energy of Si, GaAs, and GaP

Abstract

The surface energy of various planes in Si, GaAs, and GaP was measured by the use of a modified spark discharge method, previously used successfully in metals. Surface energy values were determined for the following cleavage planes in these crystals: Si {111}∼1.14 J/m², Si {110}∼1.9 J/m², GaAs {110}∼0.86 J/m², and GaP {110}∼1.9 J/m². The Si surface energy value was compared with previous experimental measurements. The Si {110}, GaAs {110}, and GaP {110} values were compared only to theoretical estimations, since as far as it is known, the surface energy of these planes have never been measured experimentally. Berg‐Barrett x‐ray topography and chemical etch pit analysis verified that plastic relaxation did not occur under the test conditions used. The cleavage surface energies determined in this work were in good agreement with previous theoretical estimations. Experimental observations confirmed a lack of plastic energy dissipation and a stability of cleavage propagation which indicated that the measured surface energies were close to the intrinsic values.