Amorphous Si prepared in a UHV plasma deposition system
- 1 December 1983
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 59-60, 731-734
- https://doi.org/10.1016/0022-3093(83)90275-2
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Impurity effects in a-Si:H solar cells due to air, oxygen, nitrogen, phosphine, or monochlorosilane in the plasmaJournal of Applied Physics, 1981