Synthesis of titanium carbonitride films by physical vapour deposition and their structure
- 1 November 1981
- journal article
- research article
- Published by Elsevier in Thin Solid Films
- Vol. 86 (1), L201-L203
- https://doi.org/10.1016/0040-6090(81)90163-2
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Enhanced ARE apparatus and TiN synthesisJournal of Vacuum Science and Technology, 1979
- Wear resistant coating of cemented carbides and high speed steels by chemical vapour depositionWear, 1978
- Wear-resistant coatings for bearing applicationsWear, 1978
- Activated Reactive Evaporation Process for High Rate Deposition of CompoundsJournal of Vacuum Science and Technology, 1972