Less energy is required to solubilize AZ‐1350 when the exposure is accomplished with kilovolt electrons than when light is used to expose the photoresist. In contrast to overexposure with light, overexposure by electrons causes an insoluble cross‐linked product to form. The solubilization reaction is enhanced by the addition of small amounts of benzotriazole, indazoles, and imidazoles, while the cross‐linking reaction is inhibited by these additives.