Double gun off-axis sputtering of large area YBa/sub 2/Cu/sub 3/O/sub 7- delta / superconducting films for microwave applications
- 1 March 1991
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Magnetics
- Vol. 27 (2), 1276-1279
- https://doi.org/10.1109/20.133417
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- A parallel plate resonator technique for microwave loss measurements on superconductorsReview of Scientific Instruments, 1990
- YBa2Cu3O7−δ superconducting films with low microwave surface resistance over large areasApplied Physics Letters, 1990
- Microwave surface resistance of epitaxial YBa2Cu3O7 thin films on sapphireApplied Physics Letters, 1990
- Microwave properties of highly oriented YBa2Cu3O7−x thin filmsApplied Physics Letters, 1990
- I n s i t u grown YBa2Cu3O7−d thin films from single-target magnetron sputteringApplied Physics Letters, 1989
- Microstructural characterization of YBa/sub 2/Cu/sub 3/O/sub 7- delta / thin films on SrTiO/sub 3/ using four-axis X-ray diffractionIEEE Transactions on Magnetics, 1989
- Reliable single-target sputtering process for high-temperature superconducting films and devicesApplied Physics Letters, 1988
- Orientation Dependence of Grain-Boundary Critical Currents inBicrystalsPhysical Review Letters, 1988
- High T c YBa2Cu3O7−x thin films on Si substrates by dc magnetron sputtering from a stoichiometric oxide targetApplied Physics Letters, 1988