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The constraints on the design and use of silicon-diaphragm pressure sensors
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The constraints on the design and use of silicon-diaphragm pressure sensors
The constraints on the design and use of silicon-diaphragm pressure sensors
JG
J.H. Greenwood
J.H. Greenwood
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1 January 1983
journal article
Published by
Institution of Engineering and Technology (IET)
in
Electronics & Power
Vol. 29
(2)
,
170-174
https://doi.org/10.1049/ep.1983.0077
Abstract
As with all devices, the silicon-diaphragm pressure sensor has limitations to both its design and field of application. This article highlights the types of compromise the designer of such devices is forced to make
Keywords
PRESSURE SENSOR
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Open Access
Cited by 9 articles