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Diagnostics of microwave plasma by laser induced fluorescence
Home
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Diagnostics of microwave plasma by laser induced fluorescence
Diagnostics of microwave plasma by laser induced fluorescence
KN
Ken Ninomiya
Ken Ninomiya
KS
Keizo Suzuki
Keizo Suzuki
SN
Shigeru Nishimatsu
Shigeru Nishimatsu
OO
Osami Okada
Osami Okada
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1 May 1986
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 4
(3)
,
1791-1794
https://doi.org/10.1116/1.573939
Abstract
No abstract available
Keywords
LASER INDUCED FLUORESCENCE
Cited by 20 articles