Quantitative determination of the intensities of known components in spectra obtained from surface analytical techniques

Abstract

Linear least‐squares methods have been used to quantitatively decompose experimental data obtained from surface analytical techniques into its separate components. The mathematical procedure for accomplishing this is described and examples are given of the use of this method with data obtained from Auger electron spectroscopy [both N(E) and derivative], x‐ray photoelectron spectroscopy, and low energy ion scattering spectroscopy. The requirements on the quality of the data are discussed.