Ion implantation distributions in inhomogeneous materials

Abstract

The integral equation for ion‐implantation range, damage, and ionization distributions in random media is generalized to allow nonuniform target materials. The generalization range equation is solved in the path‐length approximation, using power‐law cross sections, for a target consisting of two dissimilar half‐spaces. There is a discontinuity in the distribution at the interface, proportional to the value of the distribution in the material the projectile is leaving; the constant of proportionality is evaluated explicitly.