The resolution limit in ion beam experiments due to small angle scattering off background gas
- 11 March 1976
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 9 (4), 581-592
- https://doi.org/10.1088/0022-3727/9/4/007
Abstract
It is shown that the collimation limit in typical moderate energy ion beam experiments is due to background gas scatter, not slit scattering as is generally believed. The collimation limit imposes a resolution limit for any scattering or channelling experiment. A simple relationship is presented to evaluate the approximate FWHM resolution or collimation limit for these experiments.Keywords
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