A high volume precision compression molding process of glass diffractive optics by use of a micromachined fused silica wafer mold and lowTgoptical glass
- 25 August 2006
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 16 (10), 2000-2005
- https://doi.org/10.1088/0960-1317/16/10/012
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
- Micropowder blasting with nanoparticles dispersed polymer mask for rapid prototyping of glass chipJournal of Micromechanics and Microengineering, 2005
- Study on squeezing flow during nonisothermal embossing of polymer microstructuresPolymer Engineering & Science, 2005
- Compression Molding of Aspherical Glass Lenses–A Combined Experimental and Numerical AnalysisJournal of the American Ceramic Society, 2005
- Numerical Modeling of Viscoelastic Stress Relaxation During Glass Lens Forming ProcessJournal of the American Ceramic Society, 2005
- A fast prototyping process for fabrication of microfluidic systems on soda-lime glassJournal of Micromechanics and Microengineering, 2001
- Laser direct-write gray-level mask and one-step etching for diffractive microlens fabricationApplied Optics, 1998
- Method for fabrication of microfluidic systems in glassJournal of Micromechanics and Microengineering, 1998
- Smoothing of ultrasonically drilled holes in borosilicate glass by wet chemical etchingJournal of Micromechanics and Microengineering, 1996
- Improvement of spatial light modulator optical input/output performance using microlens arraysOptics Letters, 1995
- Finite‐Element Calculation of Stresses in Glass Parts Undergoing Viscous RelaxationJournal of the American Ceramic Society, 1987