Double-Scattering Mechanism to Account for the Si-X-Ray Yields Observed during Argon-Ion Bombardment of Silicon
- 15 May 1972
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review Letters
- Vol. 28 (20), 1298-1301
- https://doi.org/10.1103/physrevlett.28.1298
Abstract
Si x rays are observed when solid Si is bombarded by 160-260-keV ions. The production of such x rays is interpreted in terms of the Fano-Lichten model, and a double-scattering mechanism whereby Si vacancies are produced by electron promotion to an Ar vacancy formed in a prior collision.
Keywords
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