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Oxidation of Sputtered Niobium Nitride Films
Home
Publications
Oxidation of Sputtered Niobium Nitride Films
Oxidation of Sputtered Niobium Nitride Films
PG
P. K. Gallagher
P. K. Gallagher
WS
W. R. Sinclair
W. R. Sinclair
DB
D. D. Bacon
D. D. Bacon
GK
G. W. Kammlott
G. W. Kammlott
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1 October 1983
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 130
(10)
,
2054-2056
https://doi.org/10.1149/1.2119521
Abstract
No abstract available
Cited by 23 articles