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Aspect ratio dependent etching on metal etch: Modeling and experiment
Home
Publications
Aspect ratio dependent etching on metal etch: Modeling and experiment
Aspect ratio dependent etching on metal etch: Modeling and experiment
RX
Richard Jun Xie
Richard Jun Xie
JK
Joseph D. Kava
Joseph D. Kava
MS
Mark Siegel
Mark Siegel
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1 May 1996
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 14
(3)
,
1067-1071
https://doi.org/10.1116/1.580135
Abstract
No abstract available
Keywords
METAL
ASPECT RATIO DEPENDENT
RATIO DEPENDENT ETCHING
Cited by 14 articles