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Thermodynamic Calculation for the Vapor Growth of In
x
Ga
1-
x
As: The In-Ga-As-Cl-H System
Home
Publications
Thermodynamic Calculation for the Vapor Growth of In
x
Ga
1-
x
As: The In-Ga-As-Cl-H System
Thermodynamic Calculation for the Vapor Growth of In
x
Ga
1-
x
As: The In-Ga-As-Cl-H System
SM
Shigekazu Minagawa
Shigekazu Minagawa
HS
Hisashi Seki
Hisashi Seki
HE
Hiroshi Eguchi
Hiroshi Eguchi
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1 June 1972
journal article
Published by
IOP Publishing
in
Japanese Journal of Applied Physics
Vol. 11
(6)
,
855-859
https://doi.org/10.1143/jjap.11.855
Abstract
No abstract available
Keywords
THERMODYNAMICS
Cited by 20 articles