The Range of 120 keV Ions in Solids
- 1 February 1979
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Nuclear Science
- Vol. 26 (1), 1331-1334
- https://doi.org/10.1109/tns.1979.4330381
Abstract
A variety of heavy ions covering the mass range 24Mg to 209Bi were implanted at 120 keV using an electromagnetic isotope separator. Depth profiles of the implanted ions in thick targets of Be, C, A1 and Si were measured by He ion backscattering analysis. The measured range and range straggling of heavy ions were found to be in reasonable agreement with theory.Keywords
This publication has 2 references indexed in Scilit:
- Heavy ion ranges in aluminium and siliconRadiation Effects, 1978
- Stopping cross sections and backscattering factors for 4He ions in matter Z = 1–92, E(4He) = 400–4000 keVAtomic Data and Nuclear Data Tables, 1974