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Possibility of Metal Surface Cleaning by Electron Cyclotron Resonance Plasma of Hydrogen
Home
Publications
Possibility of Metal Surface Cleaning by Electron Cyclotron Resonance Plasma of Hydrogen
Possibility of Metal Surface Cleaning by Electron Cyclotron Resonance Plasma of Hydrogen
YS
Yuichi Sakamoto
Yuichi Sakamoto
YI
Yukio Ishibe
Yukio Ishibe
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1 February 1979
journal article
Published by
IOP Publishing
in
Japanese Journal of Applied Physics
Vol. 18
(2)
,
385-386
https://doi.org/10.1143/jjap.18.385
Abstract
Secure, On-Line Card Clearance System
Keywords
RESONANCE PLASMA
ELECTRON CYCLOTRON RESONANCE
POSSIBILITY
METAL SURFACE CLEANING
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