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Corner Undercutting in Anisotropically Etched Isolation Contours
Home
Publications
Corner Undercutting in Anisotropically Etched Isolation Contours
Corner Undercutting in Anisotropically Etched Isolation Contours
MA
M. M. Abu‐Zeid
M. M. Abu‐Zeid
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1 September 1984
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 131
(9)
,
2138-2142
https://doi.org/10.1149/1.2116035
Abstract
No abstract available
Cited by 49 articles