SIMS with a standard quadrupole residual gas analyzer
- 1 March 1974
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 45 (3), 457-458
- https://doi.org/10.1063/1.1686660
Abstract
A standard quadrupole residual gas analyzer can be used to measure secondary ion mass spectra(SIMS) if, between the sample and the entrance to the quadrupole rod system, the energy of the sputtered ions is modulated so as to produce an intensity modulation of only the low energy ions and the signal is recorded using a tuned ac amplifier.Keywords
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- Tandem Mass Spectrometer for Secondary Ion StudiesReview of Scientific Instruments, 1971