Metallo-organic decomposition (MOD) processing of ferroelectric and electro-optic films: A review
- 1 February 1990
- journal article
- review article
- Published by Taylor & Francis in Ferroelectrics
- Vol. 102 (1), 53-68
- https://doi.org/10.1080/00150199008221465
Abstract
The chemistry and physics pertinent to the various steps of MOD processing are discussed, and areas where more basic research is needed are pointed out. The preparation and properties of MOD films of PbTiO3, BaTiO3, Pb(Zr,Ti)O3, (Pb,Sr)TiO3 and (Pb,La)(Zr,Ti)O3 are discussed.Keywords
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