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A statistical analysis of ultraviolet, x-ray, and charged-particle lithographies
Home
Publications
A statistical analysis of ultraviolet, x-ray, and charged-particle lithographies
A statistical analysis of ultraviolet, x-ray, and charged-particle lithographies
HS
Henry I. Smith
Henry I. Smith
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1 January 1986
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology B
Vol. 4
(1)
,
148-153
https://doi.org/10.1116/1.583367
Abstract
No abstract available
Cited by 45 articles