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Dry process technology (reactive ion etching)
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Dry process technology (reactive ion etching)
Dry process technology (reactive ion etching)
JB
James A. Bondur
James A. Bondur
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1 September 1976
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science and Technology
Vol. 13
(5)
,
1023-1029
https://doi.org/10.1116/1.569054
Abstract
No abstract available
Keywords
ETCHING
CONFIGURATIONS
SEMICONDUCTOR
DRY PROCESS TECHNOLOGY
EXPERIMENTATION
Cited by 88 articles