Comparison of the SiH4C2H4 and SiH2Cl2C2H4 systems during the synthesis of silicon carbide ultrafine particles by laser-induced gas-phase reaction
- 31 December 1993
- journal article
- Published by Elsevier in Ceramics International
- Vol. 19 (6), 407-413
- https://doi.org/10.1016/0272-8842(93)90030-u
Abstract
No abstract availableKeywords
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