Interaction of atomic hydrogen with Zn-polar and O-polar ZnO surfaces
- 23 February 2005
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 86 (9), 091901
- https://doi.org/10.1063/1.1870103
Abstract
The interaction of Zn-polar and O-polar ZnOsurfaces with atomic hydrogen produced by a remote rf plasma source is investigated in situ and in real time using spectroscopic ellipsometry. It is found that the reactivity of ZnO with atomic hydrogen depends on polarity. The interaction of O-polar surfaces with atomic hydrogen at 100 °C is suitable for producing clean surfaces, while Zn-polar surfaces strongly react with atomic hydrogen resulting in a disruption of the ZnO lattice with formation of Znsurface clusters.Keywords
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