High Resolution Electron Microscopic Studies of Amorphous SiO Film
- 1 January 1984
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 23 (1A), L7-8
- https://doi.org/10.1143/jjap.23.l7
Abstract
High resolution electron microscopic (HREM) observations have been done for vacuum deposited SiO films. Areas 1∼2 nm in size with lattice fringes are seen in the micrographs. It is shown that the films are composed of a mixture of silicon and α-cristobalite.Keywords
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