Glow discharge preparation of amorphous hydrogenated silicon from higher silanes
- 15 October 1980
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 37 (8), 725-727
- https://doi.org/10.1063/1.92059
Abstract
Amorphous hydrogenated silicon has been deposited by plasma decomposition of Si2H6 and Si3H8. A major feature of the process is a deposition rate enhancement of over a factor of 20 compared to monosilane. The resulting films are compositionally similar to monosilane‐produced intrinsic a‐Si(H), but films deposited at 300 °C substrate temperature show greater photoconductivity. On the basis of our deposition experiments and the known thermolysis chemistry of the silanes, a conjectural model for the deposition process is presented.Keywords
This publication has 17 references indexed in Scilit:
- Influence of halides on the photoconductivity dark conductivity and photoluminescence of a-Si:HJournal of Non-Crystalline Solids, 1980
- Kinetics and mechanism of the silane decompositionInternational Journal of Chemical Kinetics, 1979
- Infrared and Raman spectra of the silicon-hydrogen bonds in amorphous silicon prepared by glow discharge and sputteringPhysical Review B, 1977
- Amorphous silicon solar cellApplied Physics Letters, 1976
- Substitutional doping of amorphous siliconSolid State Communications, 1975
- Structural, Optical, and Electrical Properties of Amorphous Silicon FilmsPhysical Review B, 1970
- The pyrolysis of monosilaneProceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences, 1966
- Synthesis of the higher silanes and germanesJournal of Inorganic and Nuclear Chemistry, 1965
- The Conversion of Silane to Higher Silanes in a Silent Electric DischargeInorganic Chemistry, 1962
- Vibrational Spectrum of DisilaneThe Journal of Chemical Physics, 1957