On dissimilarities of heavy ion ranges in aluminium and silicon
- 26 November 1979
- journal article
- Published by Elsevier in Physics Letters A
- Vol. 74 (5), 357-359
- https://doi.org/10.1016/0375-9601(79)90819-3
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Radiation enhanced outdiffusion during ion implantationApplied Physics A, 1979
- Heavy ion ranges in aluminium and siliconRadiation Effects, 1978
- Si diffusion in Al during implantation as probed by the (p, γ) resonance broadeningThin Solid Films, 1976