Electron beam duplication of integrated optical circuits and masks
- 31 December 1973
- journal article
- Published by Elsevier in Optics Communications
- Vol. 9 (4), 424-426
- https://doi.org/10.1016/0030-4018(73)90287-3
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Fabrication of optical waveguides in electron resist filmsOptics Communications, 1973
- Thin film optical components duplication methodOptics Communications, 1973
- Integrated Optics and Guided Waves—a Report of the Topical MeetingApplied Optics, 1972
- Embossed Optical WaveguidesApplied Physics Letters, 1972
- Fabrication of integrated circuits using the electron image projection system (ELIPS)IEEE Transactions on Electron Devices, 1970
- Integrated Optics: An IntroductionBell System Technical Journal, 1969