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Behavior of sorb–ac wafer pumps in plasma machines
Home
Publications
Behavior of sorb–ac wafer pumps in plasma machines
Behavior of sorb–ac wafer pumps in plasma machines
LR
L. Rosai
L. Rosai
BF
B. Ferrario
B. Ferrario
PP
P. della Porta
P. della Porta
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1 March 1978
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science and Technology
Vol. 15
(2)
,
746-750
https://doi.org/10.1116/1.569503
Abstract
No abstract available
Keywords
PLASMA MACHINES
AC WAFER
WAFER PUMPS
BEHAVIOR
SORB
PUMPS IN PLASMA
Cited by 6 articles