Secondary-Ion Collection System for an Ion Microprobe Analyzer of High Mass Resolution

Abstract

An optical system by which about 10% of the secondary ions produced by an ion microprobe are collected into the acceptance phase space of a mass spectrometer, of mass resolution over 10 000, is described. The crucial feature is that the specimen stage is divided into sections of different potential, so that the secondaries can be steered when they are at low velocities.