Multiphoton fabrication of periodic structures by multibeam interference of femtosecond pulses
- 21 April 2003
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 82 (17), 2758-2760
- https://doi.org/10.1063/1.1569987
Abstract
Femtosecond laser pulses are useful for laser microfabrication through multiphoton absorption. However, it is difficult to create interference of femtosecond pulses for the fabrication of periodic structures. In this letter, we report the fabrication of two-dimensional periodic structures by means of multibeam interference of femtosecond pulses. Scanning electron microscopy revealed a rod structure arranged into a square lattice. The possibility of controlling the period of the lattice, rod thickness, and rod shape were demonstrated.Keywords
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