Kinetic mechanism for the transformation of single-layer steps into double-layer steps by Si deposition on a vicinal Si(100) surface
- 15 July 1992
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 46 (3), 1917-1920
- https://doi.org/10.1103/physrevb.46.1917
Abstract
We perform energy calculations with the Stillinger-Weber potential to determine how the Si atoms deposited on a Si(100) surface with single-layer steps migrate to produce a surface with double-layer steps, and why the system does not evolve by the usual step flow mechanism.Keywords
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