Radio-Frequency Hexamethyldisiloxane Plasma Deposition: A Comparison of Plasma- and Deposit-Chemistry

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1 January 1997

journal article
Published by Springer Nature in Plasmas and Polymers

Vol. 2 (4), 277-300
https://doi.org/10.1023/a:1021886217900

Abstract

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Cited by 68 articles