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Pressure effects in planar magnetron sputter deposition
Home
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Pressure effects in planar magnetron sputter deposition
Pressure effects in planar magnetron sputter deposition
JH
J. C. Helmer
J. C. Helmer
CW
C. E. Wickersham
C. E. Wickersham
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1 May 1986
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 4
(3)
,
408-412
https://doi.org/10.1116/1.573892
Abstract
No abstract available
Cited by 34 articles