Sub-monolayer detection by electron microprobe analysis
- 15 November 1973
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 6 (17), 2150-2156
- https://doi.org/10.1088/0022-3727/6/17/323
Abstract
Quantitative determinations of A1, Ti, Ag and Au deposits down to 10−3 monolayers thickness on thin carbon substrates have been performed by electron micro-probe analysis with spatial resolution better than 2 μm. A linear relationship between characteristic x-ray intensity and nominal deposit thickness is shown between 10−3 and 10+2 monolayers. The lower detection limit was investigated as a function of the electron energy. Experimental results are compared with theory. Relations and references are given which enable one to estimate the sensitivity of the method for other substrate-deposit combinations.Keywords
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