X-Ray Diffraction Determination of Stresses in Thin Films
- 1 January 1988
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Composition and lattice-mismatch measurement of thin semiconductor layers by x-ray diffractionJournal of Applied Physics, 1987
- Interference peaks in double-crystal x-ray rocking curves of laser structuresApplied Physics Letters, 1986
- Strain measurement in heteroepitaxial layers—Silicon on sapphireJournal of Materials Research, 1986
- Dynamical x-ray diffraction from nonuniform crystalline films: Application to x-ray rocking curve analysisJournal of Applied Physics, 1986
- X-ray rocking curve analysis of superlatticesJournal of Applied Physics, 1984
- Kinematical x-ray diffraction in nonuniform crystalline films: Strain and damage distributions in ion-implanted garnetsJournal of Applied Physics, 1981
- X-ray measurement of minute lattice strain in perfect silicon crystalsZeitschrift für Kristallographie - Crystalline Materials, 1981