A review of techniques for polishing and planarizing chemically vapor-deposited (CVD) diamond films and substrates
- 1 July 1999
- journal article
- review article
- Published by Elsevier in Diamond and Related Materials
- Vol. 8 (7), 1198-1213
- https://doi.org/10.1016/s0925-9635(99)00088-6
Abstract
No abstract availableThis publication has 43 references indexed in Scilit:
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