50-nm x-ray lithography using synchrotron radiation

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1 November 1994

journal article
Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Vol. 12 (6), 3959-3964
https://doi.org/10.1116/1.587410

Abstract

No abstract available

Keywords

Cited by 56 articles