Ion Energy Analyzer for Plasma Measurements

Abstract
Flux measurements of low‐energy, neutral and charged particles provide direct knowledge of plasma composition and energy distribution. We describe a particle analyzer for the energy range between a few electron volts and several thousand electron volts, which is sensitive to single ions and has an inherent time resolution of less than 50 mμsec. Experimental results are given for both energy and mass analysis of positive ions ejected by a pulsed‐arc plasma gun. Significant variations in composition and energy distributions are observed with variations in gun voltage. Preliminary results are presented on the detection of low‐energy neutral particles.

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