The sputtering of compounds
- 31 January 1964
- journal article
- Published by Elsevier in Surface Science
- Vol. 1 (1), 110-118
- https://doi.org/10.1016/0039-6028(64)90021-4
Abstract
No abstract availableKeywords
This publication has 11 references indexed in Scilit:
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- Positive-Ion Bombardment of Germanium and SiliconPhysical Review B, 1957