Comparison between BAW and SAW sensor principles
- 1 September 1998
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
- Vol. 45 (5), 1314-1330
- https://doi.org/10.1109/58.726458
Abstract
A comparison is given between piezoelectrically excited bulk acoustic wave (BAW) and surface acoustic wave (SAW) elements with respect to their primary sensitivity functions and principal capabilities for sensor applications. The importance of mode purity for high dynamic range sensors is emphasized. Characteristic sensor examples are reviewed, and the special demands on the electronics for BAW and SAW elements in the sensor field are described (e.g., cable problem, wireless SAW sensors). For a fair evaluation, a performance figure, SQ, defined as the product of reduced sensitivity S and resonator Q-value, is introduced. The potential of alternative piezoelectric materials for future sensor developments is discussed briefly.Keywords
This publication has 70 references indexed in Scilit:
- Development of a saw gas sensor for monitoring so2 gasSensors and Actuators A: Physical, 1998
- SAW NOx gas sensor using WO3 thin-film sensitive coatingSensors and Actuators B: Chemical, 1997
- Organic vapor sensors based on SAW resonator and organic filmsIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1997
- Fullerene/liquid crystal mixtures as QMB- and SAW-coatings - detection of diesel- and solvent-vapoursAnalytical and Bioanalytical Chemistry, 1997
- Multiple-frequency SAW devices for chemical sensing and materials characterizationSensors and Actuators B: Chemical, 1993
- Multi-component analysis in solution using piezoelectric quartz sensors: Part I. Determination of o-cresol and m-cresol in waterAnalytica Chimica Acta, 1991
- Quartz microbalance sensors for gas detectionSensors and Actuators A: Physical, 1991
- Piezoelectric resonator as a chemical and biochemical sensing deviceSensors and Actuators A: Physical, 1990
- Quartz Crystal Thermometer for Measuring Temperature Deviations in the 10−3 to 10−6 °C RangeReview of Scientific Instruments, 1963
- Quartz Crystal ThermometerReview of Scientific Instruments, 1962