Nanoscale embossing of polymers using a thermoplastic die
- 1 May 1999
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 46 (1-4), 125-128
- https://doi.org/10.1016/s0167-9317(99)00031-3
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Efficient diffractive optics made by single-step electron beam lithography in solid PMMAJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1997
- Embossing of nanoscale features and environmentsMicroelectronic Engineering, 1997
- Imprint of sub-25 nm vias and trenches in polymersApplied Physics Letters, 1995