Sb-Implanted Aℓ Studied by Ion Backscattering and Electron Microscopy
- 1 January 1974
- book chapter
- Published by Springer Nature
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- FORMATION OF SiC IN SILICON BY ION IMPLANTATIONApplied Physics Letters, 1971
- Anomalously high collection of copper ions implanted in aluminiumPhysica Status Solidi (a), 1971
- The formation of precipitate phases in aluminium by ion implantationPhilosophical Magazine, 1969
- Impurity diffusion of antimony and silver in aluminiumThe International Journal of Applied Radiation and Isotopes, 1968