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Oxygen plasma removal of thin polymer films
Home
Publications
Oxygen plasma removal of thin polymer films
Oxygen plasma removal of thin polymer films
GT
G. N. Taylor
G. N. Taylor
TW
T. M. Wolf
T. M. Wolf
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1 November 1980
journal article
research article
Published by
Wiley
in
Polymer Engineering & Science
Vol. 20
(16)
,
1087-1092
https://doi.org/10.1002/pen.760201610
Abstract
No abstract available
Keywords
CHLORINE
OXYGEN PLASMA
POLYMER FILMS
REMOVAL RATES
THIN POLYMER
PLASMA REMOVAL
FILMS RELATIVE
Cited by 144 articles