157-nm laser micromachining of N-BK7 glass and replication for microcontact printing
- 1 August 2003
- journal article
- research article
- Published by Springer Nature in Applied Physics A
- Vol. 77 (3-4), 391-394
- https://doi.org/10.1007/s00339-002-1936-0
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Soft LithographyAngewandte Chemie International Edition, 1998
- Lithography with 157 nm lasersJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1997
- Laser beam deflection as a probe of laser ablation of materialsApplied Physics Letters, 1989