Saw and Polishing Damage in Silicon Crystal Wafers by X-Ray Topography
- 1 May 1967
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 38 (6), 2702-2704
- https://doi.org/10.1063/1.1709985
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
- New X-Ray Diffraction Microscopy Technique for the Study of Imperfections in Semiconductor CrystalsJournal of Applied Physics, 1965
- Observations of Dislocation Images in Ge by Anomalous Transmission MethodJournal of the Physics Society Japan, 1962
- A Metallographic Investigation of the Damaged Layer in Abraded Germanium SurfacesJournal of the Electrochemical Society, 1961
- Studies of Individual Dislocations in Crystals by X-Ray Diffraction MicroradiographyJournal of Applied Physics, 1959
- On the Kinetics of Quenched-in Lattice Vacancies in PlatinumJournal of Applied Physics, 1959
- Direct Observation of Individual Dislocations by X-Ray DiffractionJournal of Applied Physics, 1958